| 摘要 |
PURPOSE:To prevent generation of arc discharge due to electric field concentration, between a pair of discharge electrodes generating discharge for exciting laser gas. CONSTITUTION:Insulator 8 whose permitivity is larger than that of laser gas is arranged on the peripheral parts of discharge electrodes 1, 2 whose periperal parts are formed in arc types. By arranging the insulator 8, electric potential on the peripheral parts of the electrodes 1, 2 are made uniform, and the concentration of electric field is relieved, so that generation of arc discharge due to electric field concentration can be prevented. |
