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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0669224(A)
申请公布日期
1994.03.11
申请号
JP19920219037
申请日期
1992.08.18
申请人
FUJITSU LTD
发明人
YUYAMA KAZUMITSU
分类号
H01L21/265;H01L21/331;H01L29/73;H01L29/732;(IPC1-7):H01L21/331
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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