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发明名称
VAPOR PHASE EPITAXIAL GROWTH SYSTEM
摘要
申请公布号
JPH0669135(A)
申请公布日期
1994.03.11
申请号
JP19920244099
申请日期
1992.08.21
申请人
KOMATSU DENSHI KINZOKU KK
发明人
MARUTANI SHINJI;KATO HIROKI;HINO KAZUHIKO;OCHI NOZOMI
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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