APPARATUS AND METHOD FOR INSPECTING SEMICONDUCTOR ELEMENT,申请号JP19920217773-传众专利搜索

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发明名称	APPARATUS AND METHOD FOR INSPECTING SEMICONDUCTOR ELEMENT
摘要
申请公布号	JPH0669309(A)	申请公布日期	1994.03.11
申请号	JP19920217773	申请日期	1992.08.17
申请人	MATSUSHITA ELECTRON CORP	发明人	TAZAKI AKIO;SAITO KAZUO
分类号	G01R1/073;G01R31/26;H01L21/66;(IPC1-7):H01L21/66	主分类号	G01R1/073
代理机构		代理人
主权项
地址

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