| 摘要 |
PURPOSE:To set the reference surface which becomes the reference of a position on a surface to be inspected easily and accurately when detecting the distribution of the position of a range according to the crosswise deviation of each part of a shaded pattern image at a time by projecting the shaded pattern to a relatively wide range on the surface to be inspected. CONSTITUTION:A reference member 31 with a flat surface is laid out near a wafer 1 on a Z stage 44. When a reference surface is set, the reference member 31 is moved from a projection optical system 33 to a region where the shaded fringes are projected and the images of the fringes are picked up by a light reception optical system 34. Then, the reference member 31 is moved and the images of the fringes are picked up similarly, thus repeating the operation for storing the positions of the fringes. |
