| 摘要 |
PURPOSE:To offset the influences of the thickness, unevenness, etc., of a sample so that only the composition change of the sample can be measured by making a calculating section to calculate the ratio of the characteristic intensity of X rays to the intensity of background X rays while the section measures X-ray signals. CONSTITUTION:X-rays signals generated from a sample when the sample 20 is scanned with an electron beam are converted into electric signals by means of a detector 23 and counted by means of a wave height analyzing section 26 one energy value by one energy value after passing through an amplifier 25. A counting section 27 digitizes the electric signals. An intensity ratio calculating section 28 calculates the ratio of the characteristic intensity of X-rays within a designated energy range to the intensity of background X rays having a designated energy width. A signal displaying section 31 displays secondary electron signals and X-ray intensity ratio signals from a detector 22 and secondary electron signal amplifying section 29 on the basis of a signal from a deflecting coil control section 30. Various signals are recorded in a signal recording section 32. Since the variation of the illuminating current at the time of line analysis and quantity variation of X-ray signals caused by the unevenness of the surface of the sample 20 are eliminated, the location-wise composition variation of the sample appears in data as it is. |
