SEMICONMDUCTOR DEVICE FOR LIGHT VALVE AND ITS MANUFACTURE

摘要

PURPOSE:To constitute a transmission type semiconductor device for the light valve which has a driving circuit and a pixel array formed by utilizing a semiconductor substrate as it is. CONSTITUTION:The semiconductor device for the light valve is constituted by utilizing the semiconductor substrate 3 made of bulky single-crystal silicon, etc., having a nontransparent part 1 which has specific thickness and a transparent part 2, in which the thickness is eliminated. The pixel array 9 is formed at the transparent part 2 and the driving circuit 8 is formed on the main surface side of the nontransparent part 1. A transparent support substrate 5 is laminated on the side of the main surface 4 of the semiconductor substrate 3 to form a reinforced structure. The transparent part 2 is selectively etched away from the reverse surface side of the semiconductor substrate 3.