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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0669232(A)
申请公布日期
1994.03.11
申请号
JP19920216845
申请日期
1992.08.14
申请人
OKI ELECTRIC IND CO LTD
发明人
ASAKAWA KAZUHIKO
分类号
H01L29/78;H01L21/336;H01L29/786;(IPC1-7):H01L21/336;H01L29/784
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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