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发明名称
SPIN COATING METHOD
摘要
申请公布号
JPH0669115(A)
申请公布日期
1994.03.11
申请号
JP19910285985
申请日期
1991.10.31
申请人
FUJITSU LTD
发明人
YODA SEIICHI
分类号
B05C11/08;B05D1/40;G02F1/13;G03F7/16;H01L21/027;(IPC1-7):H01L21/027
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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