| 摘要 |
<p>PURPOSE:To obtain a flowsensor having high response of thermal conduction detection system achieved through micromachining technology of integrated circuit wherein thermal conduction efficiency is enhanced by controlling the direction of flow between heating section and detecting section or by taking advantage of the properties of flow. CONSTITUTION:A substrate 1, and a membrane heater section 2 and a membrane detecting section 3, bridged or cantilevered on the substrate 1, are arranged sequentially in the flow direction F of fluid to be measured, with the heater section 2 and the detecting section 3 being disposed below the substrate 1. At the time of operation, a sensor 5 constituted in such manner is fixed to the upper side of a conduit 6 to be measured while directing downward and an output signal is taken out through lead wires 4.</p> |
