| 摘要 |
<p>PURPOSE:To enhance the coating reliability of protective film and sensor response by forming a thin film of resistor only on the top face of protrusion provided on a substrate. CONSTITUTION:In the thermal flowsensor, a temperature dependent thin film 12a of resistor is formed only on the top face of protrusions provided on the surface of a dielectric substrate 11. A protective film 14 for resistor is provided at least on the surface where the thin film of resistor is formed and an electrode fixing terminal 13 is provided for the resistor.</p> |
