Microelectronic sensor module for measuring control and regulating circuits - has analogue and digital multiplexers, voltage- and capacitance-frequency converters arranged in one region, and sensor layout arranged in other region

摘要

The sensor module has a semiconductor chip supporting a number of sensors and a microelectronic circuit with at least one analogue multiplexer (2), a digital multiplexer (3), a voltage/frequency converter (4) and a capacitance frequency converter (5). Double bonding pads are provided between the sensor layout area of the chip and the area provided with the microelectronic layout. Pref. the outputs of the analogue multiplexer are coupled to the inputs of the digital multiplexer via the voltage/frequency converter and the capacitance/frequency converter. ADVANTAGE - Simple modification of both sensor layout and microelectronic circuit for different customer-specific applications.