发明名称 |
FUSE MELTED BY LASER |
摘要 |
In a laser-broken fuse (20) used in a memory redundancy technique, an aluminum wiring layer (18) is formed on an interlevel insulating film (16). A portion of the wiring layer (18) is selected to be broken to shut off conduction of the layer (18). A polysilicon-made heat member (14) is provided in the interlevel insulating film (16) at the place which is underneath the selected portion (32). The heat member (14) is located on a field insulating film (12). This heat member (14) generates heat by absorbing energy from a laser beam, and thermal-explodes in a sealed atmosphere so as to break the selected portion (32). <IMAGE> |
申请公布号 |
KR940001888(B1) |
申请公布日期 |
1994.03.10 |
申请号 |
KR19910007349 |
申请日期 |
1991.05.07 |
申请人 |
TOSHIBA CO., LTD. |
发明人 |
USUTA, YOSHIO;KUMAKAI, JUNPPEI;KAKI, SEIJI;ITABA, HIROAKI |
分类号 |
H01L21/82;H01L23/525;(IPC1-7):H01L23/52 |
主分类号 |
H01L21/82 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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