A semiconductor device and method of manufacture.

摘要

A semiconductor substrate (3) is utilised to integrally form a drive circuit (8) and a pixel array (9) to produce a transparent semiconductor device for a light valve. The semiconductor device for a light valve is constructed by the semiconductor substrate (3) having an opaque portion (1) and a thin transparent portion (2). The pixel array (9) is formed in the transparent portion. The drive circuit (8) is formed in a top face of the opaque portion (1). A transparent support substrate (5) is laminated to the top face of the semiconductor substrate (3) for reinforcement. A bulk of the semiconductor substrate (3) is removed from a back face by selective etching to provide the transparent portion (2).