发明名称 Process for preparing superconducting junction of oxide superconductor
摘要 Improvement in a process for fabricating a superconducting junction by depositing successively a first oxide superconductor thin layer, a non-superconducting intermediate thin film layer and a second oxide superconductor thin film layer on a substrate in this order. In the invention, the non-superconducting intermediate thin film layer is composed of MgO and the substrate is preheated at 600 degrees-650 degrees C. for at least 5 minutes in the presence of O2, and is heated at a temperature between 200 degrees and 400 degrees C. during the non-superconducting intermediate thin film layer is deposited.
申请公布号 US5292718(A) 申请公布日期 1994.03.08
申请号 US19920957639 申请日期 1992.10.06
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 TANAKA, SABURO;NAKANISHI, HIDENORI;ITOZAKI, HIDEO;MATSUURA, TAKASHI
分类号 H01L39/24;(IPC1-7):B05D5/12 主分类号 H01L39/24
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