| 摘要 |
PURPOSE: To analyze a staged laser process, based on a plurality of references by comparing a temperature signal of an infrared ray detector with a plurality of set temperature limits. CONSTITUTION: In a laser processing and monitoring device, an infrared-ray detector 26 is constituted to generate a temperature signal, having the value varied in accordance with changes of the intensity of the received infrared radiation over the prescribed test period of time, and the temperature signal is compared with a plurality of preset temperature limits. Each time the temperature signal generated by the device violates one of the limits, a violation indication is outputted, the number of the indication is counted over a prescribed period of time, and the laser process is evaluated as the function of the number of the violation indications. Thus, the monitoring by means of the device is evaluated stepwise based on a plurality of references. |
