发明名称 Method for forming vias in multilayer circuits
摘要 The invention is directed to a method for rapidly forming a pattern of vias in multilayer electronic circuits in which each of the via holes is formed by drilling with a controlled number of Nd:YAG laser beam pulses. Beam positioning is controlled by means of a programmed galvanometric beam positioner. The drilling sequence is optionally controlled by application of an heuristic algorithm of the symmetric Traveling Salesman Problem.
申请公布号 US5293025(A) 申请公布日期 1994.03.08
申请号 US19910739295 申请日期 1991.08.01
申请人 E. I. DU PONT DE NEMOURS AND COMPANY 发明人 WANG, CARL B.
分类号 B23K26/00;B23K26/02;B23K26/38;B23K101/42;H01L21/48;H05K1/02;H05K1/03;H05K1/09;H05K3/00;H05K3/46;(IPC1-7):B23K26/08 主分类号 B23K26/00
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