发明名称 |
Method for forming vias in multilayer circuits |
摘要 |
The invention is directed to a method for rapidly forming a pattern of vias in multilayer electronic circuits in which each of the via holes is formed by drilling with a controlled number of Nd:YAG laser beam pulses. Beam positioning is controlled by means of a programmed galvanometric beam positioner. The drilling sequence is optionally controlled by application of an heuristic algorithm of the symmetric Traveling Salesman Problem. |
申请公布号 |
US5293025(A) |
申请公布日期 |
1994.03.08 |
申请号 |
US19910739295 |
申请日期 |
1991.08.01 |
申请人 |
E. I. DU PONT DE NEMOURS AND COMPANY |
发明人 |
WANG, CARL B. |
分类号 |
B23K26/00;B23K26/02;B23K26/38;B23K101/42;H01L21/48;H05K1/02;H05K1/03;H05K1/09;H05K3/00;H05K3/46;(IPC1-7):B23K26/08 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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