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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH0665736(A)
申请公布日期
1994.03.08
申请号
JP19910142794
申请日期
1991.06.14
申请人
SHIBAURA ENG WORKS CO LTD;SEIKO INSTR INC
发明人
IWAMI MUNENORI;KURIYAMA NOBORU;KURODA YOSHIKI
分类号
C23C14/35;C23C14/40;C23C14/54;(IPC1-7):C23C14/35
主分类号
C23C14/35
代理机构
代理人
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地址
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