MONODISPERSE COPOLYMER AND ITS PRODUCTION

摘要

PURPOSE:To produce a new monodisperse copolymer useful as a polymer for a high-resolution resist material and having a mol.wt. arbitrarily controllable by copolymerizing two specific monomers. CONSTITUTION:This copolymer, pref. a block copolymer, comprising structural units of formulae I (wherein R is H or CH3) and II is obtd. pref. by the anionic copolymn. of monomers of formulae III and IV.