PLASMA REACTOR HEAD AND ELECTRODE STRUCTURE,申请号JP19930146521-传众专利搜索

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发明名称	PLASMA REACTOR HEAD AND ELECTRODE STRUCTURE
摘要
申请公布号	JPH0657456(A)	申请公布日期	1994.03.01
申请号	JP19930146521	申请日期	1993.06.17
申请人	HUGHES AIRCRAFT CO	发明人	ERITSUKU HANSERU
分类号	C23C16/50;C23F4/00;H01J37/32;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):C23F4/00	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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