发明名称 |
Silane compositions and process |
摘要 |
Improved process for separating ethylsilane from silane by selective adsorption onto an effectively treated carbon bed and method of treatment of such carbon bed to enhance the selective adsorption of ethylsilane.
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申请公布号 |
US5290342(A) |
申请公布日期 |
1994.03.01 |
申请号 |
US19920873461 |
申请日期 |
1992.04.24 |
申请人 |
ETHYL CORPORATION |
发明人 |
WIKMAN, ANDREW O.;PARK, WON S.;EVERLY, CHARLES R. |
分类号 |
B01D53/02;C01B33/04;(IPC1-7):B01D53/04 |
主分类号 |
B01D53/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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