| 摘要 |
A patterned mask is provided on a surface by formulating a liquid, 100% solids-type thermally curable mask composition, applying the composition as a film to the surface, selectively thermally exposing the film in the desired mask pattern using a focused beam of heat energy without use of an interposed patterned mask, and then developing away the film areas not thermally exposed so as to produce a patterned mask. The invention enables the elimination of potentially troublesome volatile solvent carriers or diluents from the composition, while at the same time still enabling production of finely-defined patterns without having to bring a patterned mask (cf. phototool) into contact with the composition. Similarly, the expense involved with use of dry film photo-sensitive masks is avoided.
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