发明名称 |
Method of obtaining hologram and an exposure apparatus |
摘要 |
A hologram exposure apparatus for and method of obtaining a hologram using a photoresist for an in-line type interferometer wherein a photoresist substrate is detachably mounted on a substrate rotating device. A concentric pattern of a hologram from a source of light is projected onto the photoresist on the substrate mounted on the substrate rotating device while rotating the substrate and moving a projecting device in a direction at right angles with the rotary shaft of the photoresist substrate.
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申请公布号 |
US5291315(A) |
申请公布日期 |
1994.03.01 |
申请号 |
US19930065449 |
申请日期 |
1993.05.21 |
申请人 |
KONICA CORPORATION |
发明人 |
HOSOE, SHIGERU |
分类号 |
G03F7/20;G03H1/08;(IPC1-7):G03H1/02;G02B5/32;G01B9/021 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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