| 发明名称 |
Process for making oxide superconducting films by pulsed excimer laser ablation |
| 摘要 |
A process for producing thin films of superconducting material by bombarding a heated target with radiation from pulsed high energy UV laser to form a plume of target material, and depositing the plume on a substrate is disclosed.
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| 申请公布号 |
US5290761(A) |
申请公布日期 |
1994.03.01 |
| 申请号 |
US19920963156 |
申请日期 |
1992.10.19 |
| 申请人 |
E. I. DU PONT DE NEMOURS AND COMPANY |
发明人 |
KEATING, KENNETH B.;THE', STEPHENS S. |
| 分类号 |
C04B35/00;C01G1/00;C01G3/00;C01G15/00;C01G21/02;C04B35/45;C23C14/08;C23C14/28;H01B12/06;H01B13/00;H01L39/24;(IPC1-7):B05D3/06;B05D5/12 |
主分类号 |
C04B35/00 |
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代理人 |
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