发明名称 |
Method to determine tool paths for thinning and correcting errors in thickness profiles of films |
摘要 |
A method to determine the tool path of a material removal tool which is part of a system to shape the surface of a substrate is disclosed. The method conditions initial metrology data of the substrate into a dwell time versus position on the surface for the removal tool. The dwell time array is subsequently converted into a velocity versus position array so that a position controller means may be utilized to guide the movement of the substrate with respect to the removal tool to perform precise material removal on the surface of the substrate.
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申请公布号 |
US5291415(A) |
申请公布日期 |
1994.03.01 |
申请号 |
US19910807544 |
申请日期 |
1991.12.13 |
申请人 |
HUGHES AIRCRAFT COMPANY |
发明人 |
ZAROWIN, CHARLES B.;BOLLINGER, L. DAVID |
分类号 |
C23F4/00;G01B11/06;G05B19/18;H01L21/3065;H01L21/66;H01L21/762;(IPC1-7):G06F15/46 |
主分类号 |
C23F4/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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