| 摘要 |
PURPOSE:To economically produce ultrapure water in the vicinity of a use point by a miniaturized apparatus. CONSTITUTION:Primary pure water 6 is received to be treated in processes (a)-(g) immediately before a use point 5 to produce ultrapure water. In the process (a), primary pure water 6 is received in an intermediate storage tank 2 to be transported to the part immediately before the use point and, in the process (b), the transported primary pure water 6 is subjected to desalting treatment in an electric regeneration type ion exchange apparatus 3 and, in the process (c), a part of the treated water from the process (b) is passed through the liquid contact part of an air permeable membrane having palladium supported thereon to supply hydrogen to the gas contact part of the membrane. In the process (d), the remaining part of the treated water from the process (b) and the treated water of the process (c) are combined to be irradiated with ultraviolet rays and, in the process (e), the treated water of the process (d) is passed through a hydrogen removing membrane to be treated and, in the process (f), the treated water of the process (e) is treated with an ion exchange resin and, in the process (g), the treated water of the process (f) is subjected to ultrafiltration. |
