发明名称 Forming a diamond material layer on an electron emitter using hydrocarbon reactant gases ionized by emitted electrons
摘要 Depositing a diamond film on an electron emitting tip including disposing hydrocarbon and etchant reactant gasses together with the tip in a reaction vessel and providing an external voltage source such that electrons, emitted from the electron emitter, disassociate hydrocarbon constituents of the reactant gas. The constituents accelerate toward and are deposited onto the tip and are selectively etched by the etchant constituents such that only the diamond form of the deposited carbon remains.
申请公布号 US5290610(A) 申请公布日期 1994.03.01
申请号 US19920834749 申请日期 1992.02.13
申请人 MOTOROLA, INC. 发明人 KANE, ROBERT C.;JASKIE, JAMES E.
分类号 C30B29/04;C23C16/27;C23C16/503;H01J1/30;H01J9/02;H01J37/317;(IPC1-7):B05D3/06;B05D5/12;C23C16/00;B01J3/06 主分类号 C30B29/04
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