NORMAL/DEFECTIVE CONDITION DISCRIMINATING METHOD FOR SIZE BY EACH PROCESS FOR PRODUCTION OF RETICULE AND RETICULE HAVING MEANS FOR THIS METHOD

摘要

PURPOSE:To enable the easy and instantaneous discrimination of the process which is the cause for a size defect in the normal/defective condition discriminating method for sizes by each process for production of reticules for LSIs. CONSTITUTION:This method is provided with a means 1delta for setting patterns for size measurement with the plural patterns for normal/defective condition discrimination of sizes, a means for forming the patterns for the normal/defective condition discrimination of sizes on exposure data by subjecting these patterns for normal/defective condition discrimination of sizes to only the one shift processing among plural shift processings included in the overall shift processing, a means for forming the respective corresponding patterns for normal/defective condition discrimination of sizes by printing the patterns for normal/defective condition discrimination of sizes on the exposure data on the reticule surface by exposing and a means 7delta for measuring the sizes of the respective patterns for normal/defective condition discrimination of sizes on the reticule. Which shift processing among the plural shift processings is defective is discriminated by whether the sizes of the respective patterns for normal/defective condition discrimination of sizes on the reticule are prescribed values or not.