| 摘要 |
PURPOSE:To replace a mask with high accuracy in a short time by shifting a mask holding means, which holds a mask to be used for exposure, among a plurality of mask holding means, which hold a plurality of masks, to a prescribed exposing position. CONSTITUTION:A retile holder 12A is loaded with a retile R1 and the retile R1 is vacuum-sucked by turning on a vacuum switch of the retile holder 12A. Then, a ball screw is driven so as to align the retile R1 and whether all the retiles R1-R3 are loaded or not is judged. An X shifting part 11 is driven to a position that allows the retile holder 12B to deliver the retile R2 by the ball screw 18 and a DC motor 19 in order to successively load the retiles R2 and R3. The process is repeated until a necessary number of retiles R1-R3 are loaded. |
