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发明名称
FORMING METHOD FOR CONTACT HOLE IN SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0653333(A)
申请公布日期
1994.02.25
申请号
JP19920203749
申请日期
1992.07.30
申请人
OKI ELECTRIC IND CO LTD
发明人
USHIGOE TAKATOSHI
分类号
H01L21/302;H01L21/3065;H01L21/768;(IPC1-7):H01L21/90
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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