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发明名称
DRY ETCHER
摘要
申请公布号
JPH0653176(A)
申请公布日期
1994.02.25
申请号
JP19920203300
申请日期
1992.07.30
申请人
MATSUSHITA ELECTRON CORP
发明人
MASUMOTO TAKAHIDE
分类号
H01L21/302;H01L21/304;H01L21/3065;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
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地址
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