METHOD OF FORMING SELF-ALIGNED CONTACT,申请号JP19920205131-传众专利搜索

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发明名称	METHOD OF FORMING SELF-ALIGNED CONTACT
摘要
申请公布号	JPH0653160(A)	申请公布日期	1994.02.25
申请号	JP19920205131	申请日期	1992.07.31
申请人	NEC CORP	发明人	NAMITA HIROMITSU
分类号	H01L21/28;H01L21/306;H01L21/768;H01L23/522;(IPC1-7):H01L21/28;H01L21/90	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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