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发明名称
FORMING METHOD FOR GATE ELECTRODE
摘要
申请公布号
JPH0653336(A)
申请公布日期
1994.02.25
申请号
JP19920205438
申请日期
1992.07.31
申请人
SHARP CORP
发明人
KAWAMURA HIROSHI
分类号
H01L23/522;H01L21/338;H01L21/768;H01L29/778;H01L29/812;(IPC1-7):H01L21/90
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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