METHOD FOR CHANGING REFRACTIVE INDEX OF POLYIMIDE

摘要

PURPOSE:To change the refractive index of a polyimide by irradiating the polyimide with an electron beam. CONSTITUTION:A polyimide is irradiated with an electron beam to change the refractive index of the polyimide. A fluorinated polyimide is appropriately used as the polyimide. The refractive index of the polyimide having 10mum thickness is increased. Accordingly, an optical waveguide is freely formed by using a mask and a drawing device. The refractive index can be distributed by selecting the energy of the electron beam, and a graded-index optical waveguide or a flat lens is formed.