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发明名称
SCANNING PROJECTION ALIGNER
摘要
申请公布号
JPH0653113(A)
申请公布日期
1994.02.25
申请号
JP19920204638
申请日期
1992.07.31
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
WATANABE TOSHIYUKI;SUZUKI MASAKI;MOCHIDA YOSHIO
分类号
G03F7/20;H01L21/30;(IPC1-7):H01L21/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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