| 摘要 |
<p>PURPOSE:To provide a thin article pick-up device capable of readily and accurately carrying out a shift, an arrangement, and the like of wafers between different wafer carrier cases or within the same wafer carrier case without using a special shifting wafer carrier case, etc. CONSTITUTION:This embodiment comprises a pair of vacuum sucking parts 3, 3' and controlling parts 5, 5' for each of the vacuum sucking parts 3, 3', and the vacuum sucking parts 3, 3' can independently attract or detach an object, respectively. In particular, the controlling parts 5, 5' are constituted of a keying button having a self-holding function.</p> |
