ECR PLASMA ETCHER,申请号JP19920061627-传众专利搜索

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发明名称	ECR PLASMA ETCHER
摘要
申请公布号	JPH0653170(A)	申请公布日期	1994.02.25
申请号	JP19920061627	申请日期	1992.03.18
申请人	NEC CORP	发明人	SAGAWA SEIJI
分类号	C23F4/00;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H01L21/302	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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