METHOD FOR STABILIZING PRESSURE OF TREATMENT CHAMBER,申请号JP19920219575-传众专利搜索

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发明名称	METHOD FOR STABILIZING PRESSURE OF TREATMENT CHAMBER
摘要
申请公布号	JPH0653169(A)	申请公布日期	1994.02.25
申请号	JP19920219575	申请日期	1992.07.28
申请人	TOKYO ELECTRON LTD	发明人	DEGUCHI YOICHI
分类号	C23C14/54;C23C16/50;C23F4/00;H01L21/302;(IPC1-7):H01L21/302	主分类号	C23C14/54
代理机构		代理人
主权项
地址

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