发明名称 FORMATION OF PIXEL ELECTRODE FOR DISPLAY DEVICE
摘要 <p>PURPOSE:To form pixel electrodes having normal constitution with good reproducibility by using extremely simple means. CONSTITUTION:Thin-film transistors are formed on a transparent insulating substrate 1 and after a resist film having patterns for forming the pixel electrodes by a lift-off method, an ITO film of a first layer is formed over the entire surface and thereafter, the resist film is peeled and the ITO film of the first layer is patterned by the lift-off method, by which the pixel electrodes 11A of the first layer are formed. An ITO film of a second layer is then formed and is then etched without using a mask, by which the pixel electrodes 11B of the second layer are formed.</p>
申请公布号 JPH0651345(A) 申请公布日期 1994.02.25
申请号 JP19920207848 申请日期 1992.08.04
申请人 FUJITSU LTD 发明人 NOMURA KAZUMASA;HOSHINO ATSUYUKI
分类号 G02F1/136;G02F1/1368;H01L21/336;H01L29/40;H01L29/78;H01L29/786;(IPC1-7):G02F1/136;H01L29/784 主分类号 G02F1/136
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