摘要 |
PURPOSE:To provide a cell structure having TFT and formation thereof in which no retriction is imposed on the layout of TFT which can thereby be laid out even if a unit cell is shortened in one direction. CONSTITUTION:In a cell structure comprising a layer constituting a thin film transistor(TFT), a layer constituting at least one transistor other than the TFT, and a TFT having cell structure formed by these transistors, power supply lines 17a, 17a' for TFT are placed at the upper or lower side of a cell and channel parts 17b, 17b' of TFT are formed substantially perpendicular to the power supply lines. The power supply lines are isolated from a contact hole 18 through a dielectric film formed on the side wall of the contact hole. |