POLYCRYSTALLINE SILICON-BASED BASE PLATE FOR LIQUID JET RECORDING HEAD, ITS MANUFACTURING METHOD, LIQUID JET RECORDING HEAD USING THE BASE PLATE, AND LIQUID JET RECORDING APPARATUS.

摘要

A base plate for a liquid jet recording head, which is provided with electrothermal converter each having a resistor for generating heat energy and a pair of wirings electrically connected to the resistor, is made of a polycrystalline substance. In the surface of the base plate, provided is an oxide layer formed by thermal oxidation and thermal softening. By utilizing such a specific base plate, a long recording head free from warp and bend can be fabricated at a low cost.