TEOS based plasma enhanced chemical vapor deposition process for deposition of silicon dioxide films.,申请号EP19870311193-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	TEOS based plasma enhanced chemical vapor deposition process for deposition of silicon dioxide films.
摘要
申请公布号	EP0272140(B1)	申请公布日期	1994.02.23
申请号	EP19870311193	申请日期	1987.12.18
申请人	APPLIED MATERIALS, INC.	发明人	WANG, DAVID NIN-KOU;WHITE, JOHN M.;LAW, KAM S.;LEUNG, CISSY;UMOTOY, SALVADOR P.;COLLINS, KENNETH S.;ADAMIK, JOHN A.;PERLOV, ILYA;MAYDAN, DAN
分类号	C23C16/44;C23C16/48;C23C16/04;C23C16/40;C23C16/42;C23C16/509;C23C16/455;C23C16/46;C23C16/50;C23C16/54;C23F4/00;C30B25/14;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;H01L21/314;H01L21/316;H01L21/683;(IPC1-7):C23C16/54	主分类号	C23C16/44
代理机构		代理人
主权项
地址

您可能感兴趣的专利

SYSTEM AND METHOD FOR ASSAYING DRUGS

ADAPTIVE CONTROL OF DATA PACKET SIZE IN NETWORKS

SYSTEM AND METHOD FOR MAINTAINING STATE BETWEEN A CLIENT AND SERVER

METHODS FOR USING ANNEXIN FOR DETECTING CELL DEATH IN VIVO AND TREATING ASSOCIATED CONDITIONS

DEVICES AND METHODS FOR CHARGING FOR AN ELECTRONIC PRE-PAID CARD WITH POSITIONAL DETERMINATION (GPS PRE-PAID CARD) FOR A DUAL GPS BASED TOLL SYSTEM

SLAGGING COMBUSTION FURNACE

SCUBA WET SUIT WITH CONSTANT BUOYANCY

COMPOUNDS USEFUL AS KINASE INHIBITORS FOR THE TREATMENT OF HYPERPROLIFERATIVE DISEASES

FRONT SURFACE RAIL

MONO-, DI- AND TRIGLYCERIDES OR THEIR MIXTURES CONTAINING TRANS-FATTY ACID RESIDUES AND METHOD OF THEIR FORMATION

DROP PLATE FEEDER

FISHING ACCESSORY, METHOD OF SECURING A LURE TO A FISHING HOOK, AND METHOD OF ATTACHING A BODY TO A FISHING LINE

METHOD AND APPARATUS FOR ADJUSTING A DIALING SEQUENCE BASED ON LOCATION

IMPROVED GENE EXPRESSION

METHOD OF INVISIBLY EMBEDDING INTO A TEXT DOCUMENT THE LICENSE IDENTIFICATION OF THE GENERATING LICENSED SOFTWARE

ARRANGEMENT AND DEVICE FOR TRANSFORMING OPTICAL RAYS

ANTITHROMBOTIC THROMBIN VARIANTS

METHOD AND APPARATUS FOR DISTRIBUTED NETWORK SECURITY

MPEG TABLE STRUCTURE

REAGENTS AND METHODS FOR DETECTION AND CHARACTERIZATION OF PROTEIN-PROTEIN INTERACTIONS, NUCLEAR EXPORT AND LOCALIZATION SEQUENCES AND INDUCIBLE GAL4P-MEDIATED GENE EXPRESSION IN YEAST