| 摘要 |
PURPOSE:To realize the manufacture of the perfect side surface electrode via the mask for the miniature etching crystal tuning fork. CONSTITUTION:Mask 10 is attached to crystal tuning fork 7 which is pulled out in many units in alignment from a sheet of the crystal wafer through the etching method along with main surface electrode 3 formed through evaporation or other methods. After this, side surface electrode 4 is formed through evaporation. In this case, 2nd mask 11 is provided over mask 10. For mask 10, the thickness t is decreased in order to obtain thin slit width b, and the uneven surface is secured in terms of the natural shape to cause some gap to fork 7. However, mask 11 can feature increased slit width b1 and thickness t1 to reduce the surface unevenness. Thus mask 10 can be adhered close to fork 7 by being pressed by mask 11, preventing electrode 4 from being swelling out over the surface of fork 7 at the evaporation time. |
