发明名称 GAS PURGING METHOD OF SEALED CONTAINER
摘要 <p>PURPOSE:To provide a gas purge method of sealed container which can eliminate the special structure of a sealed container at the time of gas purging with inactive gas after a vacuuming process. CONSTITUTION:For gas-purging with inactive gas after vacuuming a movable sealed container 1, the inside of a sealed box which communicates a vacuum source 80 with an inactive gas source 90 through piping is blocked into a body part A and a container storage part B which is communicated with the body part through a communicating hole 81 by a wall 80A. The sealed container is placed on the wall, and the bottom cover 20 of the sealed container is opened toward the inside of the sealed box to communicate the inside of the sealed container with the body part inside of the sealed box, thus carrying out vacuuming and gas purging with inactive gas.</p>
申请公布号 JPH0648508(A) 申请公布日期 1994.02.22
申请号 JP19920202660 申请日期 1992.07.29
申请人 SHINKO ELECTRIC CO LTD 发明人 YAMASHITA TEPPEI;MURATA MASANAO;TANAKA MIKI;MORITA AKIYA;KONO HITOSHI;HAYASHI MICHIHIRO;OKUNO ATSUSHI;NAKAMURA AKIO
分类号 B65B31/04;B65G1/02;B65G49/00;H01L21/673;H01L21/68;(IPC1-7):B65G1/02 主分类号 B65B31/04
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