| 摘要 |
PURPOSE: To make it possible to produce finely-divided powder by providing plural separate gas heaters for the gas preheater with respect to a device for producing finely-divided metal and/or ceramic powder. CONSTITUTION: A metal compound (TiCl4 , or the like) is evaporated through an evaporator 1, 1a and introduced from a middle filament 6 of a flow-shaping part 25 into a tube reactor 4 through a gas-preheater 2a and a gas introducing part 24. On the other hand, a reactant (H2 , NH4 , or the like) is heated at a gas preheater 2 and introduced from the surrounding filament 7 into the tube reactor 4 to produce metal or ceramic powder. At this time, two heating systems 20 are separately arranged from a gas preheater 23, the gas introducing part 24, the flow-shaping part 25 until the terminal of the tube reactor 4 so as to change gas flow rate for controlling the particle size. The reaction product and unreacted substances are sent to a blow-back filter 10. By this process, finely divided metal or ceramic powder is produced. |
