发明名称 Manufacturing method including photoresist processing using a near-field optical probe
摘要 An optical system useful, e.g., for near-field scanning optical microscopy is provided. The system incorporates a probe having improved properties. In one embodiment, the probe comprises a tapered and partially metallized portion of a single-mode optical fiber.
申请公布号 US5288998(A) 申请公布日期 1994.02.22
申请号 US19930001233 申请日期 1993.01.06
申请人 AT&T BELL LABORATORIES 发明人 BETZIG, ROBERT E.;GYORGY, ERNST M.;TRAUTMAN, JAY K.;WOLFE, RAYMOND
分类号 G01Q60/18;G01Q60/22;G11B5/00;G11B5/09;G11B9/00;G11B27/36;(IPC1-7):G02B21/06 主分类号 G01Q60/18
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