发明名称 |
Manufacturing method including photoresist processing using a near-field optical probe |
摘要 |
An optical system useful, e.g., for near-field scanning optical microscopy is provided. The system incorporates a probe having improved properties. In one embodiment, the probe comprises a tapered and partially metallized portion of a single-mode optical fiber.
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申请公布号 |
US5288998(A) |
申请公布日期 |
1994.02.22 |
申请号 |
US19930001233 |
申请日期 |
1993.01.06 |
申请人 |
AT&T BELL LABORATORIES |
发明人 |
BETZIG, ROBERT E.;GYORGY, ERNST M.;TRAUTMAN, JAY K.;WOLFE, RAYMOND |
分类号 |
G01Q60/18;G01Q60/22;G11B5/00;G11B5/09;G11B9/00;G11B27/36;(IPC1-7):G02B21/06 |
主分类号 |
G01Q60/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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