PRODUCTION OF SEMICONDUCTOR DIAMOND

摘要

PURPOSE:To produce p-type or n-type semiconductor diamond by introducing an impurity element for forming donor or acceptor level into diamond in high controllability. CONSTITUTION:A substrate material 101 made of diamond or having a diamond thin film deposited on the substrate is bombarded with accelerated particles 102 and irradiated with ultraviolet ray 104 after or during the bombardment. The damage of diamond is restored and the particles are activated by this treatment.