HARD MULTILAYERED FILM FORMED BODY AND ITS PRODUCTION

摘要

PURPOSE:To provide a hard multilayered film formed body having improved wear resistance, self-lubricity and heat resistance. CONSTITUTION:A titanium compd.-based hard wear resistant. coating layer and a silicon-contg. hard carbon layer are successively formed on the surface of a base material. The first layer is formed by plasma CVD at 400-550 deg.C, tetramethylsilane or tetraethylsilane optionally mixed with a hydrocarbon and/or hydrogen is then introduced as gaseous starting material while maintaining vacuum and the second layer is formed by plasma CVD at <=550 deg.C under 0.05-0.5Torr pressure.