SEMICONDUCTOR ELEMENT PICKUP APPARATUS

摘要

PURPOSE:To remove dusts produced by pellets by a method wherein a suction means is provided through a flexible pipe which is connected to the side opposite to a pickup collet. CONSTITUTION:A suction inlet 17 which surrounds a pickup collet 13 concentrically is provided at the tip part of a pickup arm 12 and the tip of the pickup collet 13 protrudes a little downward from the suction inlet 17. The one end of a flexible pipe 18 is connected to the suction inlet 17 and the other end is connected to a vacuum pump 19 to make the vacuum pump 19 communicate with a space 21 inside the suction inlet 17 through the flexible pipe 18. The vacuum pump 19 is driven to produce an air flow flowing into the suction inlet 17. The vacuum pump 19 is normally driven while pellets 7 are picked up. With this constitution, dusts produced by the pellets can be removed by the air flow are the pickup collet 13.