发明名称 APPARATUS AND METHOD FOR WIRE BONDING
摘要 PURPOSE:To generate predetermined ultrasonic power required for bonding for an application time with pressurizing force to a capillary by inputting data concerning at least a bonding pressurizing diameter D, a bonding pressurizing thickness WD, and the capillary used through a keyboard execution switch. CONSTITUTION:Once there is inputted data concerning a bonding pressurizing diameter D, a bonding pressurizing thickness WD, and a capillary used through a keyboard execution switch 11, an evaluation circuit 12 supplies signals (p), (t), and (f) to an ultrasonic wave control circuit 14, a width circuit 15, and a pressurization control circuit 16 with reference to a data table 13. Ultrasonic power supplied to an ultrasonic vibrator 6 and ultrasonic wave application time are controlled on the basis of the control signals (p) and (t), and pressurizing force to the capillary supplied to driving coil units 9, 9' is controlled on the basis of the control signal (f), for predetermined bonding.
申请公布号 JPH0645413(A) 申请公布日期 1994.02.18
申请号 JP19920214773 申请日期 1992.07.21
申请人 KAIJO CORP 发明人 ISHII YUKINOBU
分类号 H01L21/607;H01L21/60 主分类号 H01L21/607
代理机构 代理人
主权项
地址